Concepedia

Publication | Closed Access

An improved TMAH Si-etching solution without attacking exposed aluminum

DOI

111

Citations

8

References

2001

Year

Guizhen Yan, Philip C.H. Chan, I‐Ming Hsing, R.K. Sharma, J.K.O. Sin, Yangyuan Wang
Sensors and Actuators A Physical

References

YearCitations

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