Susumu Sugiyama

Anisotropic etching of silicon in TMAH solutions

Osamu Tabata, Ryouji Asahi, Hirofumi Funabashi et al. · Sensors and Actuators A Physical · 1992 · 458 citations

Engineering, Materials Engineering, Materials Science +14

Mechanical property measurements of thin films using load-deflection of composite rectangular membranes

Osamu Tabata, Ken Kawahata, Susumu Sugiyama et al. · Sensors and Actuators · 1989 · 400 citations

Natural Sciences, Materials Engineering, Materials Science +16

A micro electromagnetic low level vibration energy harvester based on MEMS technology

Peihong Wang, Katsuhiko Tanaka, Susumu Sugiyama et al. · Microsystem Technologies · 2009 · 178 citations

Engineering, Electrical Engineering, Mechanical Engineering +12

Integrated piezoresistive pressure sensor with both voltage and frequency output

Susumu Sugiyama, Mitsuharu Takigawa, Isemi Igarashi · Sensors and Actuators · 1983 · 90 citations

Engineering, Electrical Engineering, Mechanical Engineering +14

Development of miniaturized 6-axis accelerometer utilizing piezoresistive sensing elements

Dzung Viet Dao, Toshiyuki Toriyama, Susumu Sugiyama · Sensors and Actuators A Physical · 2006 · 80 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +14