Concepedia

Mitsuharu Takigawa

MT

Statistics

Publications

10

Citations

274

H-Index

10

Active since

1973

Affiliations

Sophia University(Current)

Toyota Central Research and Development Laboratories (Japan)

Mitsuharu Takigawa is an author at Sophia University specializing in materials science, engineering, and electronic materials.

Publications per year

1973–1990

10

Publications

10

Integrated piezoresistive pressure sensor with both voltage and frequency output

Susumu Sugiyama, Mitsuharu Takigawa, Isemi Igarashi · Sensors and Actuators · 1983 · 90 citations

Engineering, Electrical Engineering, Mechanical Engineering +14

Hetero-Epitaxial Growth of Boron Monophosphide on Silicon Substrate Using B<sub>2</sub>H<sub>6</sub>-PH<sub>3</sub>-H<sub>2</sub>System

Mitsuharu Takigawa, Makoto Hirayama, Katsufusa Shohno · Japanese Journal of Applied Physics · 1974 · 31 citations

Engineering, Materials Engineering, Materials Science +17

Diffusion Layers Formed in Si Substrates during the Epitaxial Growth of BP and Application to Devices

Takao Takenaka, Mitsuharu Takigawa, Katsufusa Shohno · Journal of The Electrochemical Society · 1978 · 29 citations

Engineering, Materials Engineering, Materials Science +17

Dielectric Constant and Refractive Index of Boron Monophosphide

Takao Takenaka, Mitsuharu Takigawa, Katsufusa Shohno · Japanese Journal of Applied Physics · 1976 · 24 citations

Natural Sciences, Materials Science, Physics +16

Control of internal stress and Young’s modulus of Si3N4 and polycrystalline silicon thin films using the ion implantation technique

Osamu Tabata, Susumu Sugiyama, Mitsuharu Takigawa · Applied Physics Letters · 1990 · 22 citations

Engineering, Materials Engineering, Materials Science +17

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