Concepedia

M. Biebl

MB

6

Publications

172

Citations

6

H-Index

1995

Active since

Affiliations

Siemens (Germany)(Current)

University of Regensburg

University of California, Berkeley

M. Biebl is an author at Siemens (Germany) specializing in mechanical engineering, engineering, and materials science.

Top concepts

EngineeringMechanical EngineeringMaterial ScienceMicrofabricationMicroelectronicsMicrostructureApplied PhysicsMaterials EngineeringMechanics Of MaterialsThin Films

Publications per year

1995–2025

6

Publications

6

In Situ Phosphorus-doped Polysilicon For Integrated Mems

M. Biebl, Greg T. Mulhern, Roger T. Howe · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 39 citations

Materials Science, Materials Engineering, Polysilicon Films +15

Young's Modulus Of In Situ Phosphorus-doped Polysilicon

M. Biebl, G. Brandl, Roger T. Howe · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 33 citations

Materials Science, Materials Engineering, Situ Phosphorus-doped Polysilicon +13

Fracture Strength Of Doped And Undoped Polysilicon

M. Biebl, H. von Philipsborn · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 30 citations

Materials Science, Polysilicon Films, Engineering +15

Micromechanics compatible with an 0.8 μm CMOS process

M. Biebl, T. Scheiter, Christofer Hierold et al. · Sensors and Actuators A Physical · 1995 · 29 citations

μM Cmos Process, Engineering, Microfabrication +5

A mechanism to explain the creep behavior of gypsum plaster

Benedikt Schug, Karl Mandel, G. Schottner et al. · Cement and Concrete Research · 2017 · 29 citations

Materials Science, Engineering, Mechanical Engineering +3

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