Effect of the AIN nucleation layer growth on AlN material quality

O. Reentilä, Frank Brunner, A. Knauer, Anna Mogilatenko, Wolfgang Neumann, H. Protzmann, M. Heuken, Michael Kneissl, M. Weyers, G. Tränkle

Journal of Crystal Growth · 2008 · 79 citations · 11 references

Concepts

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