2014 · 90 citations · 2 references
EngineeringElectrical EngineeringMaterials EngineeringElectronic MaterialsMetallurgyMicroelectronicsAlloysIntegrated Circuit DesignInterconnect ArchitectureInterconnect DesignInterconnect TechnologyMetalsCopper InterconnectsCopper MetallizationDesign Selection CriteriaElectrical InterconnectsInterconnect FabricationInterconnect ScalingMetal Interconnect ScalingMetals For Interconnects
We discuss the selection criteria for alternative metals in order to fulfill the requirements necessary for interconnects at half pitch values below 10 nm. The performance of scaled interconnects using transition metal germanides and CoAl alloys as metallization are studied and compared to conventional Cu and W interconnects.
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