Selective chemical vapor synthesis of Cu3Ge: Process optimization and film properties

Antony Premkumar Peter, L. Carbonell, Marc Schaekers, Christoph Adelmann, Johan Meersschaut, Alexis Franquet, Olivier Richard, H. Bender, Zsolt Tökei, Sven Van Elshocht

Intermetallics · 2012 · 11 citations · 34 references

Concepts

References

34