Marc Schaekers

High-k dielectrics for future generation memory devices (Invited Paper)

J. A. Kittl, Karl Opsomer, M. Popovici et al. · Microelectronic Engineering · 2009 · 246 citations

Electrical Engineering, Semiconductor Device, Engineering +7

Germanium surface passivation and atomic layer deposition of high-<i>k</i>dielectrics—a tutorial review on Ge-based MOS capacitors

Qi Xie, Shaoren Deng, Marc Schaekers et al. · Semiconductor Science and Technology · 2012 · 155 citations

Low-loss amorphous silicon-on-insulator technology for photonic integrated circuitry

Shankar Kumar Selvaraja, Erik Sleeckx, Marc Schaekers et al. · Optics Communications · 2009 · 130 citations

Photonics, Electrical Engineering, Engineering +8

Plasma-enhanced chemical vapour deposition growth of Si nanowires with low melting point metal catalysts: an effective alternative to Au-mediated growth

Francesca Iacopi, Philippe M. Vereecken, Marc Schaekers et al. · Nanotechnology · 2007 · 127 citations

Semiconductor-metal transition in thin VO2 films grown by ozone based atomic layer deposition

Geert Rampelberg, Marc Schaekers, Koen Martens et al. · Applied Physics Letters · 2011 · 91 citations · Full text

Thin Film Physics, Engineering, Two-dimensional Materials +19