Concepedia

Qi Xie

QX

Statistics

Publications

40

Citations

1.8K

H-Index

21

Active since

2005

Affiliations

Fudan University(Current)

Ghent University

State Key Laboratory of ASIC and System

Belgian Nuclear Research Centre

Qi Xie is an author at Fudan University specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface ScienceMicroelectronicsElectrical EngineeringMaterials EngineeringNanoelectronicsChemistryChemical Engineering

Publications per year

2005–2025

40

Publications

40

Atomic layer deposition of TiO2 from tetrakis-dimethyl-amido titanium or Ti isopropoxide precursors and H2O

Qi Xie, Yu-Long Jiang, Christophe Detavernier et al. · Journal of Applied Physics · 2007 · 241 citations

High Gpc, Engineering, Inorganic Photochemistry +17

Atomic layer deposition of titanium nitride from TDMAT precursor

Jan Musschoot, Qi Xie, Davy Deduytsche et al. · Microelectronic Engineering · 2008 · 171 citations

Materials Science, Engineering, Powder Metallurgy +4

Germanium surface passivation and atomic layer deposition of high-<i>k</i>dielectrics—a tutorial review on Ge-based MOS capacitors

Qi Xie, Shaoren Deng, Marc Schaekers et al. · Semiconductor Science and Technology · 2012 · 155 citations

Growth Kinetics and Crystallization Behavior of TiO[sub 2] Films Prepared by Plasma Enhanced Atomic Layer Deposition

Qi Xie, Jan Musschoot, Davy Deduytsche et al. · Journal of The Electrochemical Society · 2008 · 127 citations

Improved barrier properties of ultrathin Ru film with TaN interlayer for copper metallization

Xin-Ping Qu, Jingjing Tan, Mi Zhou et al. · Applied Physics Letters · 2006 · 103 citations

Materials Science, Materials Engineering, Material Analysis +15

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