Qi Xie

Atomic layer deposition of TiO2 from tetrakis-dimethyl-amido titanium or Ti isopropoxide precursors and H2O

Qi Xie, Yu-Long Jiang, Christophe Detavernier et al. · Journal of Applied Physics · 2007 · 245 citations

Natural Sciences, Chemistry, Materials Science +16

Atomic layer deposition of titanium nitride from TDMAT precursor

Jan Musschoot, Qi Xie, Davy Deduytsche et al. · Microelectronic Engineering · 2008 · 173 citations

Natural Sciences, Materials Engineering, Materials Science +11

Germanium surface passivation and atomic layer deposition of high-<i>k</i>dielectrics—a tutorial review on Ge-based MOS capacitors

Qi Xie, Shaoren Deng, Marc Schaekers et al. · Semiconductor Science and Technology · 2012 · 155 citations

Engineering, Materials Engineering, Materials Science +17

Growth Kinetics and Crystallization Behavior of TiO[sub 2] Films Prepared by Plasma Enhanced Atomic Layer Deposition

Qi Xie, Jan Musschoot, Davy Deduytsche et al. · Journal of The Electrochemical Society · 2008 · 129 citations

Natural Sciences, Materials Engineering, Materials Science +16

Improved barrier properties of ultrathin Ru film with TaN interlayer for copper metallization

Xin-Ping Qu, Jingjing Tan, Mi Zhou et al. · Applied Physics Letters · 2006 · 105 citations

Natural Sciences, Materials Engineering, Materials Science +15