Davy Deduytsche

Atomic layer deposition of TiO2 from tetrakis-dimethyl-amido titanium or Ti isopropoxide precursors and H2O

Qi Xie, Yu-Long Jiang, Christophe Detavernier et al. · Journal of Applied Physics · 2007 · 241 citations

High Gpc, Engineering, Inorganic Photochemistry +17

Atomic layer deposition of titanium nitride from TDMAT precursor

Jan Musschoot, Qi Xie, Davy Deduytsche et al. · Microelectronic Engineering · 2008 · 171 citations

Materials Science, Engineering, Powder Metallurgy +4

Germanium surface passivation and atomic layer deposition of high-<i>k</i>dielectrics—a tutorial review on Ge-based MOS capacitors

Qi Xie, Shaoren Deng, Marc Schaekers et al. · Semiconductor Science and Technology · 2012 · 155 citations

Growth Kinetics and Crystallization Behavior of TiO[sub 2] Films Prepared by Plasma Enhanced Atomic Layer Deposition

Qi Xie, Jan Musschoot, Davy Deduytsche et al. · Journal of The Electrochemical Society · 2008 · 127 citations

High-temperature degradation of NiSi films: Agglomeration versus NiSi2 nucleation

Davy Deduytsche, Christophe Detavernier, R.L. Van Meirhaeghe et al. · Journal of Applied Physics · 2005 · 121 citations

Materials Engineering, Materials Science, Chemical Engineering +15