Statistics
Publications
105
Citations
5.6K
H-Index
40
Active since
1975
R.L. Van Meirhaeghe is an author at Ghent University specializing in materials science, semiconductor materials, and materials engineering.
Publications per year
1975–2010
105
105
Y.P. Song, R.L. Van Meirhaeghe, W.H. Laflère et al. · Solid-State Electronics · 1986 · 560 citations
Atomic layer deposition of titanium nitride from TDMAT precursor
Jan Musschoot, Qi Xie, Davy Deduytsche et al. · Microelectronic Engineering · 2008 · 173 citations
Natural Sciences, Materials Engineering, Materials Science +11
1–5 of 105