Statistics
Publications
104
Citations
5.5K
H-Index
40
Active since
1975
R.L. Van Meirhaeghe is an author at Ghent University specializing in engineering, applied physics, and materials science.
Publications per year
1975–2010
104
104
Y.P. Song, R.L. Van Meirhaeghe, W.H. Laflère et al. · Solid-State Electronics · 1986 · 556 citations
Electrical Engineering, Semiconductor Device, Engineering +8
Atomic layer deposition of titanium nitride from TDMAT precursor
Jan Musschoot, Qi Xie, Davy Deduytsche et al. · Microelectronic Engineering · 2008 · 171 citations
1–5 of 104