Determination of tunnelling parameters in ultra-thin oxide layer poly-Si/SiO2/Si structures - Concepedia

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Determination of tunnelling parameters in ultra-thin oxide layer poly-Si/SiO2/Si structures

258

Citations

15

References

1995

Year

Michel Depas, Bert Vermeire, Paul Mertens, R.L. Van Meirhaeghe, Marc Heyns

Solid-State Electronics

Materials ScienceEngineeringTunneling MicroscopyNanoelectronicsStress-induced Leakage CurrentSurface ScienceApplied PhysicsOxide ElectronicsSemiconductor Device FabricationSilicon On InsulatorMicroelectronics

References

	Year	Citations

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