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Publications
20
Citations
1.1K
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17
Active since
2006
Jan Musschoot is an author at Ghent University specializing in engineering, materials science, and surface science.
Publications per year
2006–2012
20
20
Atomic layer deposition of titanium nitride from TDMAT precursor
Jan Musschoot, Qi Xie, Davy Deduytsche et al. · Microelectronic Engineering · 2008 · 171 citations
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