Concepedia

Publication | Closed Access

Atomic layer deposition of titanium nitride from TDMAT precursor

DOI

171

Citations

18

References

2008

Year

Jan Musschoot, Qi Xie, Davy Deduytsche, S. Van den Berghe, R.L. Van Meirhaeghe, Christophe Detavernier
Microelectronic Engineering

References

YearCitations

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