Nitride Thin Films

Nitride Thin Film is a semiconductor thin film composed of nitrogen-rich compounds, typically deposited via atomic layer deposition, distinguished by its high thermal stability, chemical inertness, and dielectric properties essential for advanced electronic device applications.

Publications

290K

Citations

22.1K

Authors

Institutions

Publications per year

2017–2026

Variants

Nitride Thin Film

Parents

Atomic Layer DepositionSemiconductor Thin Films

Publications

InGaN-Based Multi-Quantum-Well-Structure Laser Diodes

Shuji Nakamura, Masayuki Senoh, Shin‐ichi Nagahama et al. · Japanese Journal of Applied Physics · 1996 · 2.5K citations

Engineering, Materials Engineering, Materials Science +17

Nitride-based semiconductors for blue and green light-emitting devices

F. A. Ponce, D. P. Bour · Nature · 1997 · 1.7K citations

Engineering, Materials Engineering, Materials Science +14

Electromigration in thin aluminum films on titanium nitride

I. A. Blech · Journal of Applied Physics · 1976 · 1.2K citations

Engineering, Materials Engineering, Materials Science +17

Synthesis of Monolayer Hexagonal Boron Nitride on Cu Foil Using Chemical Vapor Deposition

Ki Kang Kim, Allen Hsu, Xiaoting Jia et al. · Nano Letters · 2011 · 1.2K citations

Natural Sciences, Materials Engineering, Materials Science +17

Synthesis of Few-Layer Hexagonal Boron Nitride Thin Film by Chemical Vapor Deposition

Yumeng Shi, Christoph Hamsen, Xiaoting Jia et al. · Nano Letters · 2010 · 1.2K citations

Natural Sciences, Materials Science, Physics +17

1–5 of 7K

Authors

22.1K

LH
Lars Hultman
Linköping University, Sweden
35 publications · 4.1K citations
27
h-index
RF
R. F. Davis
North Carolina State University, United States
37 publications · 2.6K citations
22
h-index
WZ
Wenjun Zhang
City University of Hong Kong, Hong Kong SAR China
27 publications · 1.5K citations
20
h-index
WZ
Weitao Zheng
Jilin University, China
28 publications · 1.2K citations
19
h-index
RG
Roy G. Gordon
Harvard University, United States
21 publications · 1.7K citations
19
h-index

1–5 of 22.1K

Institutions

1–8 of 3K

Venues

Applied Physics Letters
483 publications · 23.6K citations
80
h-index
Journal of Applied Physics
357 publications · 21.1K citations
71
h-index
Thin Solid Films
603 publications · 23.7K citations
69
h-index
Surface and Coatings Technology
504 publications · 20K citations
65
h-index
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
295 publications · 12.2K citations
55
h-index

1–5