Statistics
Publications
66
Citations
3.3K
H-Index
33
Active since
2000
S. Van den Berghe is an author at Belgian Nuclear Research Centre specializing in materials science, natural sciences, and materials engineering.
Publications per year
2000–2021
66
66
Atomic layer deposition of titanium nitride from TDMAT precursor
Jan Musschoot, Qi Xie, Davy Deduytsche et al. · Microelectronic Engineering · 2008 · 173 citations
Natural Sciences, Materials Engineering, Materials Science +11
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