Concepedia

J. D. Ferguson

JD

19

Publications

1.5K

Citations

16

H-Index

1927

Active since

Affiliations

University of Colorado Boulder(Current)

Cornell University

J. D. Ferguson is an author at University of Colorado Boulder specializing in engineering, surface science, and materials science.

Top concepts

EngineeringMaterial ScienceSurface ScienceApplied PhysicsChemistryThin FilmsMaterials EngineeringChemical EngineeringNanotechnologyNatural Sciences

Publications per year

1927–2011

19

Publications

19

Atomic layer deposition of ultrathin and conformal Al2O3 films on BN particles

J. D. Ferguson, Alan W. Weimer, Steven M. George · Thin Solid Films · 2000 · 206 citations

Materials Science, Engineering, Physics +9

Atomic Layer Deposition of Al<sub>2</sub>O<sub>3</sub> Films on Polyethylene Particles

J. D. Ferguson, Alan W. Weimer, Steven M. George · Chemistry of Materials · 2004 · 192 citations

Sequential Exposures, Engineering, Chemistry +23

Surface chemistry and film growth during TiN atomic layer deposition using TDMAT and NH3

Jeffrey W. Elam, Mikael Schuisky, J. D. Ferguson et al. · Thin Solid Films · 2003 · 180 citations

Materials Science, Engineering, Surface Chemistry +7

ALD of SiO[sub 2] at Room Temperature Using TEOS and H[sub 2]O with NH[sub 3] as the Catalyst

J. D. Ferguson, E.R. Smith, Alan W. Weimer et al. · Journal of The Electrochemical Society · 2004 · 134 citations

Engineering, Chemistry, Catalyst Activation +19

Atomic layer deposition of boron nitride using sequential exposures of BCl3 and NH3

J. D. Ferguson, Alan W. Weimer, Steven M. George · Thin Solid Films · 2002 · 119 citations

Materials Science, Materials Engineering, Boron Nitride +8

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