Concepedia

Erik Sleeckx

ES

38

Publications

1.2K

Citations

21

H-Index

1992

Active since

Affiliations

University of Antwerp

University of Pardubice

Brewer Science (United States)

Erik Sleeckx is an author at IMEC specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsElectrical EngineeringElectronic PackagingThin FilmsMicrofabricationMaterials EngineeringNanoelectronics

Publications per year

1992–2020

38

Publications

38

Low-loss amorphous silicon-on-insulator technology for photonic integrated circuitry

Shankar Kumar Selvaraja, Erik Sleeckx, Marc Schaekers et al. · Optics Communications · 2009 · 130 citations

Photonics, Electrical Engineering, Engineering +8

Highly efficient grating coupler between optical fiber and silicon photonic circuit

Shankar Kumar Selvaraja, Diedrik Vermeulen, Marc Schaekers et al. · 2009 · 81 citations

Photonics, Optical Materials, Optical Interconnects +13

Integration challenges of copper Through Silicon Via (TSV) metallization for 3D-stacked IC integration

J. Van Olmen, Cedric Huyghebaert, Jan Coenen et al. · Microelectronic Engineering · 2010 · 77 citations

Materials Science, Silicon Via, Electrical Engineering +14

On the optical constants of amorphous GexSe1−x thin films of non-uniform thickness prepared by plasma-enhanced chemical vapour deposition

E. Márquez, P. Nagels, J.M. González-Leal et al. · Vacuum · 1999 · 69 citations

Materials Science, Optical Materials, Engineering +11

Influence of Composition of SiCN as Interfacial Layer on Plasma Activated Direct Bonding

Fumihiro Inoue, Lan Peng, Serena Iacovo et al. · ECS Journal of Solid State Science and Technology · 2019 · 68 citations · Full text

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