Concepedia

Fumihiro Inoue

FI

47

Publications

1.2K

Citations

22

H-Index

2000

Active since

Affiliations

IMEC(Current)

KU Leuven

University of Tsukuba

Yokohama National University

Kansai University

Fumihiro Inoue is an author at IMEC specializing in engineering, materials science, and applied physics.

ORCID

Top concepts

Publications per year

2000–2024

47

Publications

47

Influence of Composition of SiCN as Interfacial Layer on Plasma Activated Direct Bonding

Fumihiro Inoue, Lan Peng, Serena Iacovo et al. · ECS Journal of Solid State Science and Technology · 2019 · 68 citations · Full text

Electroless Cu deposition on atomic layer deposited Ru as novel seed formation process in through-Si vias

Fumihiro Inoue, Harold Philipsen, Aleksandar Radisic et al. · Electrochimica Acta · 2013 · 56 citations

, , +12

Formation of electroless barrier and seed layers in a high aspect ratio through-Si vias using Au nanoparticle catalyst for all-wet Cu filling technology

Fumihiro Inoue, Tomohiro Shimizu, Takumi Yokoyama et al. · Electrochimica Acta · 2011 · 53 citations

, , +10

Hybrid 14nm FinFET - Silicon Photonics Technology for Low-Power Tb/s/mm <sup>2</sup> Optical I/O

Michał Rakowski, Yuseok Ban, Peter De Heyn et al. · 2018 · 45 citations

Origin of Voids at the SiO<sub>2</sub>/SiO<sub>2</sub> and SiCN/SiCN Bonding Interface Using Positron Annihilation Spectroscopy and Electron Spin Resonance

Fuya Nagano, Fumihiro Inoue, Alain Phommahaxay et al. · ECS Journal of Solid State Science and Technology · 2023 · 44 citations · Full text

, , +15

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