Concepedia

Author

Fuya Nagano

IMECORCID

Also Known As

F. Nagano, Fuya Nagano

19

Publications

192

Citations

7

H-Index

25

Concepts

All Affiliations

IMECKU Leuven
FN

About

Fuya Nagano is an author at IMEC specializing in materials science, engineering, and applied physics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

7

7

177

2

Materials Science

7

7

177

3

Applied Physics

6

6

161

4

Materials Engineering

5

5

117

5

Electrical Engineering

3

3

77

Fuya Nagano

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7

Publications

177

Citations

7

H-Index

YearCitations

Origin of Voids at the SiO<sub>2</sub>/SiO<sub>2</sub> and SiCN/SiCN Bonding Interface Using Positron Annihilation Spectroscopy and Electron Spin Resonance

Fuya Nagano, Fumihiro Inoue, Alain Phommahaxay,

ECS Journal of Solid State Science and Technology

2023

44

Film Characterization of Low-Temperature Silicon Carbon Nitride for Direct Bonding Applications

Fuya Nagano, Serena Iacovo, Alain Phommahaxay,

ECS Journal of Solid State Science and Technology

2020

30

Void Formation Mechanism Related to Particles During Wafer-to-Wafer Direct Bonding

Fuya Nagano, Serena Iacovo, Alain Phommahaxay,

ECS Journal of Solid State Science and Technology

2022

26

Direct Bonding Using Low Temperature SiCN Dielectrics

Serena Iacovo, Fuya Nagano, Venkat Sunil Kumar Channam,

2022 IEEE 72nd Electronic Components and Technology Conference (ECTC)

2022

25

Characterization of bonding activation sequences to enable ultra-low Cu/SiCN wafer level hybrid bonding

Serena Iacovo, Lan Peng, Fuya Nagano,

2021

22

Tip-clearance Effect on Mixing Performance of Twin Screw Extruders

Takeshi Ishikawa, Fuya Nagano, Toshihisa Kajiwara,

International Polymer Processing

2006

16

The unique properties of SiCN as bonding material for hybrid bonding

Serena Iacovo, Soon-Wook Kim, Fuya Nagano,

2021

14

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