Concepedia

Fuya Nagano

FN

7

Publications

177

Citations

7

H-Index

2006

Active since

Affiliations

Fuya Nagano is an author at IMEC specializing in materials science, engineering, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsMaterials EngineeringThin FilmsSurface ScienceMicroelectronicsElectronic PackagingElectrical EngineeringPhysics

Publications per year

2006–2023

7

Publications

7

Origin of Voids at the SiO<sub>2</sub>/SiO<sub>2</sub> and SiCN/SiCN Bonding Interface Using Positron Annihilation Spectroscopy and Electron Spin Resonance

Fuya Nagano, Fumihiro Inoue, Alain Phommahaxay et al. · ECS Journal of Solid State Science and Technology · 2023 · 44 citations · Full text

Materials Science, Semiconductors, Sio 2 +15

Film Characterization of Low-Temperature Silicon Carbon Nitride for Direct Bonding Applications

Fuya Nagano, Serena Iacovo, Alain Phommahaxay et al. · ECS Journal of Solid State Science and Technology · 2020 · 30 citations · Full text

Direct Bonding Applications, Engineering, Film Characterization +17

Void Formation Mechanism Related to Particles During Wafer-to-Wafer Direct Bonding

Fuya Nagano, Serena Iacovo, Alain Phommahaxay et al. · ECS Journal of Solid State Science and Technology · 2022 · 26 citations · Full text

Materials Science, Materials Engineering, Wafer-to-wafer Direct Bonding +15

Direct Bonding Using Low Temperature SiCN Dielectrics

Serena Iacovo, Fuya Nagano, Venkat Sunil Kumar Channam et al. · 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC) · 2022 · 25 citations

Materials Science, Materials Engineering, Electrical Engineering +14

Characterization of bonding activation sequences to enable ultra-low Cu/SiCN wafer level hybrid bonding

Serena Iacovo, Lan Peng, Fuya Nagano et al. · 2021 · 22 citations

Materials Science, Materials Engineering, Electrical Engineering +15

Rows per page

1–5 of 7