Concepedia

Interconnect Fabrication

Interconnect Fabrication is a microfabrication process in integrated circuit manufacturing that constitutes the formation of conductive pathways to electrically connect discrete device elements, distinguished from other fabrication processes by its specific role in enabling signal and power distribution within multilayered semiconductor architectures.

681

Publications

28.8K

Citations

3.4K

Authors

549

Institutions

Publications per year

2017–2026

88

Parents

Publications

681

Damascene copper electroplating for chip interconnections

P. C. Andricacos, Cyprian Uzoh, John Dukovic et al. · IBM Journal of Research and Development · 1998 · 1.2K citations

, , +16

A 45nm Logic Technology with High-k+Metal Gate Transistors, Strained Silicon, 9 Cu Interconnect Layers, 193nm Dry Patterning, and 100% Pb-free Packaging

K. Mistry, R. Chau, Changhwan Choi et al. · 2007 · 829 citations

, , +17

Carbon nanotubes in interconnect applications

Franz Kreupl, Anthony Graham, Georg S. Duesberg et al. · Microelectronic Engineering · 2002 · 630 citations

, , +14

Bottom-up approach for carbon nanotube interconnects

Jun Li, Qi Ye, Alan M. Cassell et al. · Applied Physics Letters · 2003 · 520 citations · Full text

, , +17

Forming Electrical Networks in Three Dimensions by Self-Assembly

David H. Gracias, Joe Tien, Tricia L. Breen et al. · Science · 2000 · 500 citations

, , +14

1–5 of 681

Authors

3.4K

  1. PA
    Paul A. Kohl

    Georgia Institute of Technology, United States

    10 publications · 460 citations

    10

    h-index

  2. RT
    Rao Tummala

    Georgia Institute of Technology, United States

    9 publications · 143 citations

    9

    h-index

  3. CR
    C. R. Kao

    National Taiwan University, Taiwan

    10 publications · 226 citations

    9

    h-index

  4. DE
    D. Edelstein

    IBM (United States), United States

    8 publications · 1.1K citations

    8

    h-index

  5. MS
    Muhannad S. Bakir

    Georgia Institute of Technology, United States

    8 publications · 280 citations

    8

    h-index

1–5 of 3.4K

Institutions

549

  1. IBM (United States)

    Armonk, United States

    23 h-index

    236 publications

    22.5K citations

  2. Georgia Institute of Technology

    Atlanta, United States

    21 h-index

    183 publications

    6K citations

  3. Intel (United States)

    Santa Clara, United States

    20 h-index

    293 publications

    50.9K citations

  4. IMEC

    Leuven, Belgium

    15 h-index

    193 publications

    6.8K citations

  5. Rensselaer Polytechnic Institute

    Troy, United States

    13 h-index

    52 publications

    2.3K citations

  6. Institute of Microelectronics

    Singapore, Singapore

    12 h-index

    74 publications

    1.9K citations

  7. IBM Research - Thomas J. Watson Research Center

    Yorktown Heights, United States

    12 h-index

    49 publications

    8.1K citations

  8. Massachusetts Institute of Technology

    Cambridge, United States

    12 h-index

    51 publications

    2K citations

1–8 of 549

Venues

  1. Microelectronic Engineering

    39 publications · 1.6K citations

    19

    h-index

  2. Applied Physics Letters

    16 publications · 1.2K citations

    15

    h-index

  3. Journal of The Electrochemical Society

    JES · 18 publications · 1.1K citations

    14

    h-index

  4. Journal of Electronic Materials

    JEM · 24 publications · 1.1K citations

    14

    h-index

  5. IEEE Transactions on Electron Devices

    15 publications · 1.1K citations

    13

    h-index

1–5