n+/p ultra-shallow junction formation with plasma immersion ion implantation

Plasma source ion-implantation technique for surface modification of materials

J. R. Conrad, Joachim Radtke, R.A. Dodd et al. · Journal of Applied Physics · 1987 · 1.1K citations

Engineering, Materials Engineering, Materials Science +16

Plasma immersion ion implantation for ULSI processing

N.W. Cheung · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1991 · 128 citations

Natural Sciences, Physics, Plasma Physics +8

Characteristics of sub-100-nm p/sup +//n junctions fabricated by plasma immersion ion implantation

E.C. Jones, N.W. Cheung · IEEE Electron Device Letters · 1993 · 49 citations

Engineering, Electrical Engineering, Materials Science +17

Plasma immersion ion implantation doping using a microwave multipolar bucket plasma

Shu Qin, N.E. McGruer, Chi Hou Chan et al. · IEEE Transactions on Electron Devices · 1992 · 48 citations

Engineering, Electrical Engineering, Physics +14

Sub-100 mn p+/n junction formation using plasma immersion ion implantation

Xueyu Qian, N.W. Cheung, M. A. Lieberman et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1991 · 47 citations

Natural Sciences, Materials Science, Physics +11