Xueyu Qian - Concepedia

Author

Xueyu Qian

Applied Materials (United States)

Also Known As

X. Y. Qian, X.-Y. Qian, X.Y. Qian, Xin-Yi Qian, Xinyan Qian, Xue-yu Qian, Xueyu Qian

Publications

432

Citations

H-Index

Concepts

All Affiliations

Applied Materials (United States)University of California, Berkeley Materials Processing (United States)Lawrence Berkeley National Laboratory NEC (Japan)

About

Xueyu Qian is an author at Applied Materials (United States) specializing in engineering, applied physics, and surface science.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	11	11	381
2	Applied Physics	9	9	343
3	Electrical Engineering	5	5	164
4	Chemical Engineering	2	2	94
5	Biomedical Engineering	1	1	47

Xueyu Qian

Publications

381

Citations

H-Index

Page 1

	Year	Citations
Characteristics and mechanism of etch process sensitivity to chamber surface condition Songlin Xu, Zhiwen Sun, Xueyu Qian, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringBr DensitiesPlasma ProcessingChamber SurfaceHigh Density	2001	66
Plasma immersion ion implantation of SiF4 and BF3 for sub-100 nm <i>P</i>+/<i>N</i> junction fabrication Xueyu Qian, N.W. Cheung, M. A. Lieberman, Applied Physics Letters Semiconductor TechnologyElectrical EngineeringElectronic DevicesEngineeringIon Implantation	1991	58
Sub-100 mn p+/n junction formation using plasma immersion ion implantation Xueyu Qian, N.W. Cheung, M. A. Lieberman, Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms Materials EngineeringIon ImplantationEngineeringApplied PhysicsIon Beam	1991	47
Pd/Si plasma immersion ion implantation for selective electroless copper plating on SiO2 Meng-Hsiung Kiang, M. A. Lieberman, N.W. Cheung, Applied Physics Letters EngineeringChemical DepositionSilicon On InsulatorSio2 TrenchesIon Implantation	1992	38
Spatial distributions of thin oxide charging in reactive ion etcher and MERIE etcher Hang‐Sik Shin, Ko Noguchi, Xueyu Qian, IEEE Electron Device Letters EngineeringReactive Ion EtcherMerie EtcherCharge TransportMagnetism	1993	36
Conformal implantation for trench doping with plasma immersion ion implantation Xueyu Qian, N.W. Cheung, M. A. Lieberman, Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms Materials ScienceIon ImplantationConformal ImplantationEngineeringApplied Physics	1991	33
Fluorocarbon polymer formation, characterization, and reduction in polycrystalline–silicon etching with CF4-added plasma Songlin Xu, Zhiwen Sun, Arthur Chen, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringOxide DepositionPolymer NanocompositesPlasma ProcessingPolymers	2001	28
A plasma immersion ion implantation reactor for ULSI fabrication Xueyu Qian, D. Carl, J. Benasso, Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms Ion ImplantationEngineeringMicrofabricationUlsi FabricationPlasma Application	1991	25
Pulse-time-modulated inductively coupled plasma etching for high-performance polysilicon patterning on thin gate oxides Hiroto Ohtake, Ko Noguchi, Seiji Samukawa, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Thin Gate OxidesEngineeringIntegrated CircuitsSilicon On InsulatorHbr Plasma	2000	19
Plasma immersion Pd ion implantation seeding pattern formation for selective electroless Cu plating Xueyu Qian, Meng-Hsiung Kiang, J. Huang, Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms Materials SciencePattern FormationIon ImplantationEngineeringMicrofabrication	1991	18

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