Concepedia

Publication | Closed Access

Conformal implantation for trench doping with plasma immersion ion implantation

DOI

33

Citations

6

References

1991

Year

Xueyu Qian, N.W. Cheung, M. A. Lieberman, R. Brennan, Michael Current, N. Jha
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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