Concepedia

Publication | Closed Access

Sub-100 mn p+/n junction formation using plasma immersion ion implantation

DOI

47

Citations

6

References

1991

Year

Xueyu Qian, N.W. Cheung, M. A. Lieberman, Michael Current, Paul K. Chu, William L. Harrington, C. W. Magee, E. M. Botnick
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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