William L. Harrington

Secondary ion quadrupole mass spectrometer for depth profiling—design and performance evaluation

C. W. Magee, William L. Harrington, Richard E. Honig · Review of Scientific Instruments · 1978 · 144 citations

On the use of CsX+ cluster ions for major element depth profiling in secondary ion mass spectrometry

C. W. Magee, William L. Harrington, E. M. Botnick · International Journal of Mass Spectrometry and Ion Processes · 1990 · 111 citations

Csx+ Cluster Ions, Spectroscopy, Natural Sciences +11

Low-energy ion-scattering spectrometry (ISS) of the SiO2/Si interface

William L. Harrington, Richard E. Honig, Alvin M. Goodman et al. · Applied Physics Letters · 1975 · 79 citations

Semiconductors, Oxide Heterostructures, Materials Science +13

Depth profiling of sodium in SiO2 films by secondary ion mass spectrometry

C. W. Magee, William L. Harrington · Applied Physics Letters · 1978 · 71 citations

Engineering, Ion Beam Instrumentation, Integrated Circuits +18

Ion scattering spectrometry below 10 keV

Richard E. Hong, William L. Harrington · Thin Solid Films · 1973 · 65 citations

Physics, Natural Sciences, Spectroscopy +2