E. M. Botnick

On the use of CsX+ cluster ions for major element depth profiling in secondary ion mass spectrometry

C. W. Magee, William L. Harrington, E. M. Botnick · International Journal of Mass Spectrometry and Ion Processes · 1990 · 111 citations

Csx+ Cluster Ions, Spectroscopy, Natural Sciences +11

Hydrogen depth profiling using SIMS—Problems and their solutions

C. W. Magee, E. M. Botnick · Journal of Vacuum Science and Technology · 1981 · 104 citations

Engineering, Nuclear Physics, Simulation +21

Sub-100 mn p+/n junction formation using plasma immersion ion implantation

Xueyu Qian, N.W. Cheung, M. A. Lieberman et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1991 · 47 citations

Materials Engineering, Ion Implantation, Engineering +5

Response of Ion-Sensitive Plates as a Function of Ion Energy

J. R. Woolston, Richard E. Honig, E. M. Botnick · Review of Scientific Instruments · 1967 · 10 citations

Engineering, Ion Detection, Chemistry +17

Chlorine Content in Dry and Wet MOS Gate Oxides

W. A. Bösenberg, C. W. Magee, E. M. Botnick · Journal of The Electrochemical Society · 1984 · 10 citations · Full text

Materials Engineering, Chemical Engineering, Engineering +7