Jiqun Shao

Charging effects in plasma immersion ion implantation for microelectronics

Shu Qin, J.D. Bernstein, Zhuofan Zhao et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 26 citations

Engineering, Electrical Engineering, Physics +16

Shallow junction formation by plasma immersion ion implantation

Jiqun Shao, E.C. Jones, N.W. Cheung · Surface and Coatings Technology · 1997 · 25 citations

Natural Sciences, Physics, Electronic Materials +9

Dose–time relation in BF3 plasma immersion ion implantation

Jiqun Shao, M. Round, Shu Qin et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 20 citations

Engineering, Physics, Dose-response Modeling +10

Ultrathin silicon oxynitride film formation by plasma immersion nitrogen implantation

I. J. R. Baumvol, C. Krug, F. C. Stedile et al. · Applied Physics Letters · 1999 · 18 citations · Full text

Engineering, Materials Engineering, Materials Science +17

n+/p ultra-shallow junction formation with plasma immersion ion implantation

B. L. Yang, E.C. Jones, N.W. Cheung et al. · Microelectronics Reliability · 1998 · 18 citations

Engineering, Electrical Engineering, Physics +13