Concepedia

Shallow junction formation by plasma immersion ion implantation

Jiqun Shao, E.C. Jones, N.W. Cheung

Surface and Coatings Technology · 1997 · 25 citations · 2 references

DOI

Concepts

References

2

Characteristics of sub-100-nm p/sup +//n junctions fabricated by plasma immersion ion implantation

E.C. Jones, N.W. Cheung · IEEE Electron Device Letters · 1993 · 49 citations

, , +17

Dose rate and thermal budget optimization for ultrashallow junctions formed by low-energy (2–5 keV) ion implantation

Michael Craig, A. Sultan, Keerthi Dorai Swamy Reddy et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 21 citations

, , +15