Concepedia
Statistics
Publications
37
Citations
1.3K
H-Index
19
Active since
1987
Affiliations
Northeastern University(Current)
Micron (United States)
City University of Hong Kong
Eaton (United States)
University of California, Los Angeles
Shu Qin is an author at Northeastern University specializing in engineering, applied physics, and electrical engineering.
Top concepts
EngineeringApplied PhysicsElectrical EngineeringMicroelectronicsMaterial SciencePhysicsPlasma PhysicsNanoelectronicsMaterials EngineeringPlasma Theory
Publications per year
1987–2015
Plasma immersion ion implantation—a fledgling technique for semiconductor processing
Paul K. Chu, Shu Qin, Chung Chan et al. · Materials Science and Engineering R Reports · 1996 · 344 citations
Ion Implantation, Engineering, Applied Physics +4
A ±5-V CMOS analog multiplier
Shu Qin, R.L. Geiger · IEEE Journal of Solid-State Circuits · 1987 · 120 citations
/Spl Plusmn/4 V, /Spl Plusmn/5-v Supplies, Engineering +8
Plasma immersion ion implantation doping experiments for microelectronics
Shu Qin · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 59 citations
Electrical Engineering, Ion Implantation, Engineering +12
Hydrogenation of polycrystalline silicon thin film transistors by plasma ion implantation
J.D. Bernstein, Shu Qin, Tsu-Jae King · IEEE Electron Device Letters · 1995 · 59 citations
Materials Science, Plasma Ion Implantation, Electrical Engineering +11
Instrumental and process considerations for the fabrication of silicon-on-insulators (SOI) structures by plasma immersion ion implantation
Paul K. Chu, Shu Qin, N.W. Cheung et al. · IEEE Transactions on Plasma Science · 1998 · 55 citations
Plasma Implantation, Engineering, Silicon On Insulator +16
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