Concepedia
Statistics
Publications
37
Citations
1.3K
H-Index
19
Active since
1987
Affiliations
Northeastern University(Current)
Micron (United States)
City University of Hong Kong
Eaton (United States)
University of California, Los Angeles
Shu Qin is an author at Northeastern University specializing in plasma immersion ion implantation, physics, and ion implantation.
Publications per year
1987–2015
Plasma immersion ion implantation—a fledgling technique for semiconductor processing
Paul K. Chu, Shu Qin, Chung Chan et al. · Materials Science and Engineering R Reports · 1996 · 345 citations
Natural Sciences, Electrical Engineering, Physics +14
A ±5-V CMOS analog multiplier
Shu Qin, R.L. Geiger · IEEE Journal of Solid-State Circuits · 1987 · 120 citations
Engineering, Electrical Engineering, Analog Electronics +14
Plasma immersion ion implantation doping experiments for microelectronics
Shu Qin · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 59 citations
Engineering, Electrical Engineering, Physics +17
Hydrogenation of polycrystalline silicon thin film transistors by plasma ion implantation
J.D. Bernstein, Shu Qin, Tsu-Jae King · IEEE Electron Device Letters · 1995 · 59 citations
Engineering, Electrical Engineering, Materials Science +11
Wafer dependence of Johnsen–Rahbek type electrostatic chuck for semiconductor processes
Shu Qin, Allen McTeer · Journal of Applied Physics · 2007 · 57 citations
Engineering, Electrical Engineering, Materials Science +10
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