Plasma immersion ion implantation—a fledgling technique for semiconductor processing - Concepedia

Concepedia

Publication | Closed Access

Plasma immersion ion implantation—a fledgling technique for semiconductor processing

344

Citations

83

References

1996

Year

Paul K. Chu, Shu Qin, Chung Chan, N.W. Cheung, Lawrence A. Larson

Materials Science and Engineering R Reports

Ion ImplantationEngineeringApplied PhysicsPlasma PhysicsSemiconductor ProcessingPlasma ApplicationPlasma Processing

References

	Year	Citations

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