Concepedia

Allen McTeer

AM

Statistics

Publications

12

Citations

244

H-Index

11

Active since

2005

Affiliations

Micron (United States)(Current)

University of California, Los Angeles

Allen McTeer is an author at Micron (United States) specializing in electronic materials, materials science, and doping.

Publications per year

2005–2013

12

Publications

12

Wafer dependence of Johnsen–Rahbek type electrostatic chuck for semiconductor processes

Shu Qin, Allen McTeer · Journal of Applied Physics · 2007 · 57 citations

Engineering, Electrical Engineering, Materials Science +10

SIMS/ARXPS—A New Technique of Retained Dopant Dose and Profile Measurement of Ultralow-Energy Doping Processes

Shu Qin, Kent Zhuang, Shi-Feng Lu et al. · IEEE Transactions on Plasma Science · 2008 · 31 citations

Natural Sciences, Materials Engineering, Materials Science +13

Device Performance Improvement of PMOS Devices Fabricated by $\hbox{B}_{2}\hbox{H}_{6}$ PIII/PLAD Processing

Shu Qin, Allen McTeer · IEEE Transactions on Electron Devices · 2007 · 26 citations

Engineering, Electrical Engineering, Materials Engineering +13

Characterization and optimization of a plasma doping process using a pulsed RF-excited B2H6 plasma system

Shu Qin, Allen McTeer · Surface and Coatings Technology · 2006 · 24 citations

Natural Sciences, Materials Science, Physics +11

PLAD (Plasma Doping) on 22nm Technology Node and Beyond - Evolutionary and/or Revolutionary

Shu Qin, Yongjun Hu, Allen McTeer · 2012 · 19 citations

Engineering, Electrical Engineering, Materials Science +13

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