Challenges in the implementation of low-k dielectrics in the back-end of line - Concepedia

Concepedia

Publication | Closed Access

Challenges in the implementation of low-k dielectrics in the back-end of line

110

Citations

31

References

2005

Year

R.J.O.M. Hoofman, G.J.A.M. Verheijden, J. Michelon, Francesca Iacopi, Youssef Travaly, Mikhaı̈l R. Baklanov, Zs. Tôkei, Gerald Beyer

Microelectronic Engineering

Electrical EngineeringDielectricsEngineeringHigh-frequency DeviceAntennaApplied PhysicsTransmission LineComputational ElectromagneticsMicroelectronicsMicrowave EngineeringLow-k DielectricsElectrical InsulationElectromagnetic Compatibility

References

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