G.J.A.M. Verheijden

Challenges in the implementation of low-k dielectrics in the back-end of line

R.J.O.M. Hoofman, G.J.A.M. Verheijden, J. Michelon et al. · Microelectronic Engineering · 2005 · 110 citations

Electrical Engineering, Dielectrics, Engineering +10

Scalable 1.1 GHz fundamental mode piezo-resistive silicon MEMS resonator

J.T.M. van Beek, G.J.A.M. Verheijden, G.E.J. Koops et al. · 2007 · 50 citations

Electrical Engineering, Engineering, Oscillators +11

Advanced Cu interconnects using air gaps

L.G. Gosset, A. Farcy, J. de Pontcharra et al. · Microelectronic Engineering · 2005 · 30 citations

3D Ic Architecture, Electrical Engineering, Engineering +7

A piezo-resistive resonant MEMS amplifier

J.T.M. van Beek, K.L. Phan, G.J.A.M. Verheijden et al. · 2008 · 28 citations

Electrical Engineering, Mhz Resonator, Engineering +14

The evolution of multi-level air gap integration towards 32 nm node interconnects

R. Daamen, P.H.L. Bancken, Việt Hùng Nguyễn et al. · Microelectronic Engineering · 2007 · 22 citations

3D Ic Architecture, Electrical Engineering, Engineering +11