Concepedia

Publication | Closed Access

Advanced Cu interconnects using air gaps

DOI

30

Citations

7

References

2005

Year

L.G. Gosset, A. Farcy, J. de Pontcharra, Ph. Lyan, R. Daamen, G.J.A.M. Verheijden, V. Arnal, F. Gaillard, D. Bouchu, P.H.L. Bancken,
Microelectronic Engineering

References

YearCitations

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