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Fabrication and electrical characterization of 4H-SiC p+–n–n+ diodes with low differential resistance

Materials ScienceSemiconductor TechnologyElectrical EngineeringEngineeringLow Differential ResistanceNanoelectronicsApplied PhysicsElectrical CharacterizationCarbideSemiconductor Device4H-sic P+–n–n+ Diodes