Concepedia

Publication | Open Access

Surface micromachining

DOIFull Paper Access

71

Citations

23

References

1992

Year

Christian Linder, L. Paratte, M.-A. Grétillat, V.P. Jaecklin, N. F. de Rooij
Journal of Micromechanics and Microengineering

Abstract

SAMLAB

References

YearCitations

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