Concepedia

Sacrificial Layer Processing

Sacrificial Layer Processing is a microfabrication technique in which a temporary structural layer is selectively deposited and subsequently removed to enable the formation of suspended or movable microelectromechanical components.

187

Publications

7.6K

Citations

764

Authors

226

Institutions

Publications per year

2017–2026

26

Parents

Children

Publications

187

The potential to improve cell infiltration in composite fiber-aligned electrospun scaffolds by the selective removal of sacrificial fibers

Brendon M. Baker, Albert O. Gee, Robert B. Metter et al. · Biomaterials · 2008 · 615 citations · Full text

, , +17

Mechanical stability and adhesion of microstructures under capillary forces. I. Basic theory

Carlos H. Mastrangelo, C.H. Hsu · Journal of Microelectromechanical Systems · 1993 · 488 citations

, , +17

Capacitive micromachined ultrasonic transducers: fabrication technology

A.S. Erguri, Yongli Huang, Xuefeng Zhuang et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2005 · 268 citations

, , +17

Water‐Soluble Sacrificial Layers for Surface Micromachining

Vincent Linder, Byron D. Gates, Declan Ryan et al. · Small · 2005 · 207 citations

, , +14

Silicon dioxide sacrificial layer etching in surface micromachining

Johannes Bühler, F-P Steiner, H. Baltes · Journal of Micromechanics and Microengineering · 1997 · 172 citations

, , +17

1–5 of 187

Authors

764

  1. HB
    Hansu Birol

    École Polytechnique Fédérale de Lausanne, Switzerland

    7 publications · 238 citations

    7

    h-index

  2. PR
    Peter Ryser

    École Polytechnique Fédérale de Lausanne, Switzerland

    6 publications · 221 citations

    6

    h-index

  3. TM
    Thomas Maeder

    École Polytechnique Fédérale de Lausanne, Switzerland

    6 publications · 221 citations

    6

    h-index

  4. MG
    Mark G. Allen

    Georgia Institute of Technology, United States

    6 publications · 232 citations

    6

    h-index

  5. CJ
    Caroline Jacq

    École Polytechnique Fédérale de Lausanne, Switzerland

    4 publications · 102 citations

    4

    h-index

1–5 of 764

Institutions

226

  1. École Polytechnique Fédérale de Lausanne

    Lausanne, Switzerland

    11 h-index

    37 publications

    1.7K citations

  2. Georgia Institute of Technology

    Atlanta, United States

    7 h-index

    26 publications

    613 citations

  3. Centre National de la Recherche Scientifique

    Paris, France

    5 h-index

    18 publications

    366 citations

  4. University of Illinois Urbana-Champaign

    Urbana, United States

    4 h-index

    14 publications

    524 citations

  5. Centro Nacional de Microelectrónica

    Barcelona, Spain

    4 h-index

    9 publications

    214 citations

  6. University of Michigan

    Ann Arbor, United States

    4 h-index

    6 publications

    701 citations

  7. University of Twente

    Enschede, The Netherlands

    4 h-index

    18 publications

    787 citations

  8. Delft University of Technology

    Delft, The Netherlands

    4 h-index

    11 publications

    982 citations

1–8 of 226

Venues

  1. Journal of Micromechanics and Microengineering

    JMM · 31 publications · 1.4K citations

    21

    h-index

  2. Sensors and Actuators A Physical

    16 publications · 465 citations

    14

    h-index

  3. Microelectronic Engineering

    9 publications · 194 citations

    9

    h-index

  4. Journal of Microelectromechanical Systems

    9 publications · 1K citations

    9

    h-index

  5. Microsystem Technologies

    5 publications · 130 citations

    5

    h-index

1–5