F-P Steiner - Concepedia

Author

F-P Steiner

Also Known As

F-P Steiner

Publications

172

Citations

H-Index

Concepts

All Affiliations

F-P Steiner is an author at ETH Zurich specializing in microfluidics, chemical engineering, and microfabrication.

#	Concept	H-Index	Publications	Citations
1	Engineering	1	1	172
2	Applied Physics	1	1	172
3	Chemical Engineering	1	1	172
4	Materials Science	1	1	172
5	Microelectronics	1	1	172

F-P Steiner

Publications

172

Citations

H-Index

Page 1

	Year	Citations
Silicon dioxide sacrificial layer etching in surface micromachining Johannes Bühler, F-P Steiner, H. Baltes Journal of Micromechanics and Microengineering Materials ScienceSelectivity IssuesChemical EngineeringEngineeringMicromachines	1997	172

Page 1