Capillary Force Reduction
Capillary Force Reduction is a microfabrication technique within sacrificial layer processing that minimizes adhesive capillary forces during wet etching and drying steps to prevent structural collapse in high-aspect-ratio microelectromechanical systems.
64
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2.7K
Citations
314
Authors
102
Institutions
Publications per year
2017–2026
36
Parents
64
Hongqiang Wang, Chen Zhang, Xiujie Ji et al. · ACS Applied Materials & Interfaces · 2022 · 79 citations
Natural Sciences, Materials Engineering, Materials Science +17
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Chinese Academy of Sciences
Beijing, China
3 h-index
14 publications
644 citations
University of Wisconsin–Madison
Madison, United States
3 h-index
8 publications
212 citations
Tianjin University
Tianjin, China
2 h-index
5 publications
112 citations
Dalian University of Technology
Dalian, China
2 h-index
11 publications
260 citations
Kyungpook National University
Daegu, South Korea
2 h-index
9 publications
522 citations

University of Toronto
Toronto, Canada
2 h-index
5 publications
153 citations
Tokyo Electron (Japan)
Tokyo, Japan
2 h-index
5 publications
100 citations

Hokkaido University
Sapporo, Japan
2 h-index
9 publications
294 citations
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9 publications · 426 citations
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2 publications · 93 citations
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2 publications · 30 citations
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ChemComm · 2 publications · 98 citations
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2 publications · 81 citations
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