Capillary Force Reduction

Capillary Force Reduction is a microfabrication technique within sacrificial layer processing that minimizes adhesive capillary forces during wet etching and drying steps to prevent structural collapse in high-aspect-ratio microelectromechanical systems.

64

Publications

2.7K

Citations

314

Authors

102

Institutions

Publications per year

2017–2026

36

Authors

314

  1. PL
    Pierre Lambert

    Université Libre de Bruxelles, Belgium

    2 publications · 37 citations

    2

    h-index

  2. MW
    Min Wan

    Northwestern Polytechnical University, China

    2 publications · 53 citations

    2

    h-index

  3. AD
    Ai Du

    Tongji University, China

    1 publications · 79 citations

    1

    h-index

  4. ZT
    Ze Tian

    Harbin Institute of Technology, China

    1 publications · 67 citations

    1

    h-index

  5. YZ
    Yuang Zhang

    Dalian University of Technology, China

    1 publications · 24 citations

    1

    h-index

1–5 of 314

Venues

  1. ACS Applied Materials & Interfaces

    9 publications · 426 citations

    9

    h-index

  2. Soft Matter

    2 publications · 93 citations

    2

    h-index

  3. 2

    h-index

  4. Chemical Communications

    ChemComm · 2 publications · 98 citations

    2

    h-index

  5. Journal of Colloid and Interface Science

    2 publications · 81 citations

    2

    h-index

1–5