Concepedia

Mems Beam Release

MEMS Beam Release is a microfabrication process that selectively removes a sacrificial layer to liberate a mechanical beam structure in a microelectromechanical system, enabling its free movement or deformation.

9

Publications

197

Citations

38

Authors

17

Institutions

Publications per year

2017–2026

1

Parents

Publications

9

A MEMS Bistable Device With Push-On–Push-Off Capability

Hen‐Wei Huang, Yao‐Joe Yang · Journal of Microelectromechanical Systems · 2012 · 38 citations

, , +15

Comparative study of various release methods for polysilicon surface micromachining

J.Y. Kim, Chang‐Jin Kim · 2002 · 31 citations

, , +17

Selective W for Coating and Releasing MEMS Devices

S. S. Mani, J. G. Fleming, J.J. Sniegowski et al. · MRS Proceedings · 1999 · 28 citations · Full text

, , +11

<title>MEMS cantilever beam electrostatic pull-in model</title>

G.J. O'Brien, David J. Monk, Liwei Lin · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 28 citations

, , +17

Deformation characteristics of electroplated MEMS cantilever beams released by plasma ashing

Tae June Kang, J.G. Kim, Jangho Kim et al. · Sensors and Actuators A Physical · 2008 · 18 citations

, , +14

1–5 of 9

Authors

38

  1. HH
    Hen‐Wei Huang

    Massachusetts Institute of Technology, United States

    1 publications · 38 citations

    1

    h-index

  2. YY
    Yao‐Joe Yang

    National Taiwan University, Taiwan

    1 publications · 38 citations

    1

    h-index

  3. YH
    Yeo Hyung Kim

    Catholic University of Korea, South Korea

    2 publications · 36 citations

    1

    h-index

  4. YK
    Young-Jae Kim

    Seoul National University, South Korea

    2 publications · 36 citations

    1

    h-index

  5. JK
    J.Y. Kim

    University of California, Los Angeles, United States

    1 publications · 31 citations

    1

    h-index

1–5 of 38

Institutions

17

  1. University of California, Los Angeles

    Los Angeles, United States

    2 h-index

    6 publications

    96 citations

  2. Sandia National Laboratories California

    Livermore, United States

    1 h-index

    8 publications

    224 citations

  3. Seoul National University

    Seoul, South Korea

    1 h-index

    9 publications

    162 citations

  4. National Taiwan University

    Taipei, Taiwan

    1 h-index

    2 publications

    76 citations

  5. University of Twente

    Enschede, The Netherlands

    1 h-index

    4 publications

    40 citations

  6. Samsung (South Korea)

    Seoul, South Korea

    1 h-index

    2 publications

    36 citations

  7. Delft University of Technology

    Delft, The Netherlands

    1 h-index

    2 publications

    30 citations

  8. Michigan United

    Kalamazoo, United States

    1 h-index

    1 publications

    28 citations

1–8 of 17

Venues

  1. Journal of Microelectromechanical Systems

    2 publications · 51 citations

    2

    h-index

  2. Journal of Micromechanics and Microengineering

    JMM · 2 publications · 25 citations

    2

    h-index

  3. MRS Proceedings

    1 publications · 28 citations

    1

    h-index

  4. 1

    h-index

  5. Sensors and Actuators A Physical

    1 publications · 18 citations

    1

    h-index

1–5