Chang‐Wook Baek

Mechanical characterization of micro/nanoscale structures for MEMS/NEMS applications using nanoindentation techniques

Xiaodong Li, Bharat Bhushan, Kazuki Takashima et al. · Ultramicroscopy · 2003 · 323 citations

Materials Science, Nanoindentation Techniques, Engineering +12

Raman microspectroscopy study of processing-induced phase transformations and residual stress in silicon

Yury Gogotsi, Chang‐Wook Baek, F.‐G. Kirscht · Semiconductor Science and Technology · 1999 · 235 citations

Materials Science, Engineering, Material Processing +11

Measurement of the mechanical properties of electroplated gold thin films using micromachined beam structures

Chang‐Wook Baek, Yong-Kweon Kim, Yoomin Ahn et al. · Sensors and Actuators A Physical · 2004 · 141 citations

Materials Science, Micromachined Beam Structures, Engineering +9

Chemical mechanical polishing by colloidal silica-based slurry for micro-scratch reduction

Yoomin Ahn, Joon‐Yong Yoon, Chang‐Wook Baek et al. · Wear · 2004 · 93 citations

Materials Science, Self-cleaning Surface, Chemical Engineering +9

The SiOG-Based Single-Crystalline Silicon (SCS) RF MEMS Switch With Uniform Characteristics

J.-M. Kim, J.-H. Park, Chang‐Wook Baek et al. · Journal of Microelectromechanical Systems · 2004 · 69 citations

Electrical Engineering, Uniform Characteristics, Engineering +13