Concepedia

Selective W for Coating and Releasing MEMS Devices

S. S. Mani, J. G. Fleming, J.J. Sniegowski, Maarten P. Boer, Lloyd W. Irwin, Jeremy A. Walraven, D. A. La Van

MRS Proceedings · 1999 · 28 citations · 11 references

DOIFull text

Open access

Concepts

References

11

Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines

U. Srinivasan, M.R. Houston, Roger T. Howe et al. · Journal of Microelectromechanical Systems · 1998 · 425 citations

, , +17

Selective Low Pressure Chemical Vapor Deposition of Tungsten

E. K. Broadbent, Chuck Ramiller · Journal of The Electrochemical Society · 1984 · 220 citations

, , +17

Polycrystalline Silicon Micromechanical Beams

Roger T. Howe, R.S. Muller · Journal of The Electrochemical Society · 1983 · 192 citations

, , +17

Surface micromachined microengine

Ernest J. Garcia, Jeffry J. Sniegowski · Sensors and Actuators A Physical · 1995 · 189 citations

Performance Impact of Monolayer Coating of Polysilicon Micromotors

Keren Deng, Rochael J. Collins, Mehran Mehregany et al. · Journal of The Electrochemical Society · 1995 · 78 citations

, , +16