Xuefeng Zhuang

Capacitive micromachined ultrasonic transducers: fabrication technology

A.S. Erguri, Yongli Huang, Xuefeng Zhuang et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2005 · 266 citations

Engineering, Mechanical Engineering, Biomedical Engineering +16

Integration of 2D CMUT arrays with front-end electronics for volumetric ultrasound imaging

I.O. Wygant, Xuefeng Zhuang, David T. Yeh et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2008 · 240 citations · Full text

Fabrication of Flexible Transducer Arrays With Through-Wafer Electrical Interconnects Based on Trench Refilling With PDMS

Xuefeng Zhuang, Der-Song Lin, Ömer Oralkan et al. · Journal of Microelectromechanical Systems · 2008 · 80 citations

Engineering, Mechanical Engineering, Through-wafer Electrical Interconnects +20

Capacitive micromachined ultrasonic transducers with piston-shaped membranes: fabrication and experimental characterization

Yongli Huang, Xuefeng Zhuang, Edward Hæggström et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2009 · 69 citations

Biomedical Acoustics, Engineering, Mechanical Engineering +18

Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer

Der-Song Lin, Xuefeng Zhuang, Serena H. Wong et al. · Journal of Microelectromechanical Systems · 2010 · 50 citations · Full text

Materials Science, Ultrasonic Transducer, Engineering +13