Concepedia

Bulk Micromachining Release

Bulk Micromachining Release is a sacrificial layer processing technique that involves selectively etching a bulk substrate material to free movable microstructures, distinguished by its use of the substrate itself as the sacrificial layer.

4

Publications

95

Citations

14

Authors

5

Institutions

Publications per year

2017–2026

0

Parents

Publications

4

The Black Silicon Method V: A Study Of The Fabricating Of Movable Structures For Micro Electromechanical Systems

M. de Boer, Henri Jansen · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 40 citations · Full text

, , +17

Control of liquid bridging induced stiction of micromechanical structures

Takeshi Abe, Michael L. Reed · Journal of Micromechanics and Microengineering · 1996 · 28 citations

, , +17

Analysis and prevention of convex corner undercutting in bulk micromachined silicon microstructures

Kanishka Biswas, Soumen Das, S. Kal · Microelectronics Journal · 2005 · 17 citations

, , +16

A Novel Micromachining Technique to Fabricate Released GaAs Microstructures with a Rectangular Cross Section

Seung‐Joon Paik, Jongpal Kim, Sang-Jun Park et al. · Japanese Journal of Applied Physics · 2003 · 10 citations

, , +17

1–4 of 4

Authors

14

  1. KB
    Kanishka Biswas

    Jawaharlal Nehru Centre for Advanced Scientific Research, India

    1 publications · 17 citations

    1

    h-index

  2. SL
    Seung-Ki Lee

    Dankook University, South Korea

    1 publications · 10 citations

    1

    h-index

  3. SD
    Soumen Das

    Indian Institute of Technology Kharagpur, India

    1 publications · 17 citations

    1

    h-index

  4. DC
    Dong‐il Cho

    Seoul National University, South Korea

    1 publications · 10 citations

    1

    h-index

  5. HJ
    Henri Jansen

    University of Twente, Netherlands

    1 publications · 40 citations

    1

    h-index

1–5 of 14

Institutions

5

  1. Carnegie Mellon University

    Pittsburgh, United States

    1 h-index

    2 publications

    56 citations

  2. Seoul National University

    Seoul, South Korea

    1 h-index

    6 publications

    60 citations

  3. Indian Institute of Technology Kharagpur

    Kharagpur, India

    1 h-index

    3 publications

    51 citations

  4. Dankook University

    Jukjeon-dong, South Korea

    1 h-index

    1 publications

    10 citations

  5. University of Twente

    Enschede, The Netherlands

    1 h-index

    3 publications

    120 citations

1–5 of 5

Venues

  1. Japanese Journal of Applied Physics

    JJAP · 1 publications · 10 citations

    1

    h-index

  2. 1

    h-index

  3. Microelectronics Journal

    1 publications · 17 citations

    1

    h-index

  4. Journal of Micromechanics and Microengineering

    JMM · 1 publications · 28 citations

    1

    h-index

1–4