Analysis and prevention of convex corner undercutting in bulk micromachined silicon microstructures

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers

H. Seidel, L. Csepregi, A. Heuberger et al. · Journal of The Electrochemical Society · 1990 · 1.6K citations

Natural Sciences, Materials Engineering, Materials Science +17

Anisotropic etching of silicon in TMAH solutions

Osamu Tabata, Ryouji Asahi, Hirofumi Funabashi et al. · Sensors and Actuators A Physical · 1992 · 458 citations

Engineering, Materials Engineering, Materials Science +14

Characterization of orientation-dependent etching properties of single-crystal silicon: effects of KOH concentration

Kazuo Sato, Mitsuhiro Shikida, Yoshihiro Matsushima et al. · Sensors and Actuators A Physical · 1998 · 321 citations

Engineering, Materials Engineering, Materials Science +12

The Controlled Etching of Silicon in Catalyzed Ethylenediamine‐Pyrocatechol‐Water Solutions

Arnold Reisman, M. Berkenblit, S. A. Chan et al. · Journal of The Electrochemical Society · 1979 · 208 citations

Natural Sciences, Materials Engineering, Materials Science +17