HTCVD growth of semi-insulating 4H-SiC crystals with low defect density - Concepedia

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HTCVD growth of semi-insulating 4H-SiC crystals with low defect density

47

Citations

18

References

2000

Year

A. Ellison, Björn Magnusson, Carl Hemmingsson, W. Magnusson, Tihomir Iakimov, L. Storasta, Anne Henry, Niklas Henelius, Erik Janzén

MRS Proceedings

Materials ScienceEngineeringApplied PhysicsSemiconductor MaterialDefect FormationHtcvd GrowthCarbide

References

	Year	Citations

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