Electrical Analyses of Germanium MIS Structure and Spectroscopic Measurement of the Interface Trap Density in an Insulator/Germanium Interface at Room Temperature

Abstract

In this paper, we present an equivalent circuit model of a germanium (Ge) MIS structure that is biased in the inversion region, which includes the effects of the high intrinsic carrier density and high diffusion-limited conductance of the Ge substrate at room temperature. The model can successfully express the gate bias and frequency dependences of the capacitance characteristics that are specific to the Ge MIS capacitor. Moreover, it will be shown that the interface trap density and its gate bias dependence in the inversion region can be spectroscopically determined from the gate bias and measurement frequency dependences of the equivalent parallel conductance of the Ge surface.