Toshiro Ono

An iterative learning control law for dynamical systems

Toshiharu Sugie, Toshiro Ono · Automatica · 1991 · 213 citations

Natural Sciences, Mathematics, Dynamical Systems +11

Electron Cyclotron Resonance Plasma Deposition Technique Using Raw Material Supply by Sputtering

Toshiro Ono, Chiharu Takahashi, Seitaro Matsuo · Japanese Journal of Applied Physics · 1984 · 132 citations

Natural Sciences, Materials Engineering, Materials Science +10

Reactive ion stream etching utilizing electron cyclotron resonance plasma

Toshiro Ono, M. Oda, Chiharu Takahashi et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 85 citations

Engineering, Materials Engineering, Materials Science +14

An electron cyclotron resonance plasma deposition technique employing magnetron mode sputtering

Chiharu Takahashi, Mikiho Kiuchi, Toshiro Ono et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 53 citations

Natural Sciences, Materials Engineering, Materials Science +15

Low-Temperature Formation of High-Quality $ \hbox{GeO}_{2}$ Interlayer for High-$\kappa$ Gate Dielectrics/Ge by Electron-Cyclotron-Resonance Plasma Techniques

Yukio Fukuda, Yuya Yazaki, Yohei Otani et al. · IEEE Transactions on Electron Devices · 2009 · 50 citations

Natural Sciences, Materials Science, Physics +16