Concepedia

Mikiho Kiuchi

MK

5

Publications

516

Citations

5

H-Index

1978

Active since

Affiliations

NTT (Japan)(Current)

NTT Basic Research Laboratories

Mikiho Kiuchi is an author at NTT (Japan) specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceThin FilmsSurface ScienceElectrical EngineeringPhysicsMagnetismInstrumentationMicroelectronics

Publications per year

1978–1993

5

Publications

5

Low Temperature Chemical Vapor Deposition Method Utilizing an Electron Cyclotron Resonance Plasma

Seitaro Matsuo, Mikiho Kiuchi · Japanese Journal of Applied Physics · 1983 · 395 citations

Materials Science, Sio 2, Electrical Engineering +14

An electron cyclotron resonance plasma deposition technique employing magnetron mode sputtering

Chiharu Takahashi, Mikiho Kiuchi, Toshiro Ono et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 53 citations

Engineering, Electron Cyclotron Resonance, Thin Film Process Technology +16

SiC synthesis by a plasma deposition process

Hideo Yoshihara, Hidefumi Mori, Mikiho Kiuchi · Thin Solid Films · 1981 · 36 citations

Materials Engineering, Materials Science, Engineering +4

Processing Uniformity Improvement by Magnetic Field Distribution Control in Electron Cyclotron Resonance Plasma Chamber

Hiroshi Nishimura, Mikiho Kiuchi, Seitaro Matsuo · Japanese Journal of Applied Physics · 1993 · 20 citations

Magnetism, Electrical Engineering, Engineering +14

Preparation of Si–C Films by Plasma Deposition Process with Neutralization

Hideo Yoshihara, Hidefumi Mori, Mikiho Kiuchi et al. · Japanese Journal of Applied Physics · 1978 · 12 citations

Materials Science, Engineering, Surface Science +7

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